首页> 外国专利> AIRLESS ATOMIZING METHOD FOR MANUFACTURING CHEMICAL MECHANICAL PLANARIZATION (CMP) POLISHING PAD

AIRLESS ATOMIZING METHOD FOR MANUFACTURING CHEMICAL MECHANICAL PLANARIZATION (CMP) POLISHING PAD

机译:制造化学机械平面化(CMP)抛光垫的无气雾化方法

摘要

The present invention provides a method for manufacturing a chemical mechanical planarization (CMP) polishing pad, the method comprising: a step of introducing, separately, to an internal chamber having a downstream open end, a liquid polyol component stream comprising an amine curative at a temperature T1 of 40-90C and a liquid isocyanate component stream at a temperature T2 of 40-90C, each under a set point pressure of 13,000-24,000 kPa through a side liquid feed port, such that the two streams are pointed towards each other and flow at 90 degrees to downstream flow, to form a reaction mixture by an impingement mixing the two components; a step of discharging a stream of the reaction mixture from the open end of the internal chamber under pressure through a narrow, preferably, round orifice and onto an open mold substrate having a urethane releasing surface; and a step of curing the reaction mixture to form a porous polyurethane reaction product.;COPYRIGHT KIPO 2018
机译:本发明提供了一种用于制造化学机械平坦化(CMP)抛光垫的方法,该方法包括:将具有胺固化剂的液态多元醇组分流分别引入到具有下游开口端的内室中的步骤。温度T1为40-90C,液态异氰酸酯组分物流在温度T2为40-90C时,各自在13,000-24,000 kPa的设定点压力下通过侧边液体进料口,使两股物流彼此相对与下游流体呈90度流动,通过冲击混合两种成分形成反应混合物。将反应混合物流在压力下从内部腔室的开口端通过一个狭窄的,最好是圆形的孔口排放到具有尿烷释放表面的敞口模具基材上的步骤;固化反应混合物以形成多孔聚氨酯反应产物的步骤。; COPYRIGHT KIPO 2018

著录项

  • 公开/公告号KR20180062378A

    专利类型

  • 公开/公告日2018-06-08

    原文格式PDF

  • 申请/专利权人 DOW GLOBAL TECHNOLOGIES LLC;

    申请/专利号KR20170159310

  • 发明设计人 ADAM BRODERICK;DOUGLAS A. BRUNE;

    申请日2017-11-27

  • 分类号C08J9/22;B24B37/24;C08G18/32;

  • 国家 KR

  • 入库时间 2022-08-21 12:39:51

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