Gas Module for Atomic Layer Deposition Apparatus Atomic Layer Deposition Apparatus Deposition Method using the same

摘要

Atomic layer deposition equipment gas modules are provided. The atomic layer deposition equipment gas module according to an embodiment of the present invention includes a first gas module provided with a source gas supply part for supplying a source gas toward a substrate and a first purge gas supply part for providing a purge gas toward the substrate, A second gas module positioned in a transport direction of the substrate with respect to the first gas module and having a reaction gas supply part for supplying a reactive gas toward the substrate and a second purge gas supply part for supplying a purge gas toward the substrate,;