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COATING LIQUID FOR FORMING METAL OXIDE FILM METAL OXIDE FILM FIELD-EFFECT TRANSISTOR AND METHOD FOR PRODUCING FIELD-EFFECT TRANSISTOR
COATING LIQUID FOR FORMING METAL OXIDE FILM METAL OXIDE FILM FIELD-EFFECT TRANSISTOR AND METHOD FOR PRODUCING FIELD-EFFECT TRANSISTOR
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机译:用于形成金属氧化物膜的涂层液体金属氧化物膜场效应晶体管及制造场效应晶体管的方法
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摘要
Indium compounds; A magnesium compound, a calcium compound, a strontium compound, and a barium compound; At least one compound selected from the group consisting of a compound containing a metal having a maximum amount of oxidation water of IV, a compound containing a metal having a maximum amount of oxidation water of V, and a metal containing a metal having a maximum amount of oxidation water of VI; And a coating solution for forming a metal oxide film containing an organic solvent.
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