- MEMS SEMICONDUCTOR DEVICE AND SIGMA-DELTA LOOP MEMS ACQUISITION

摘要

Semiconductor device measures the condition of the MEMS as a first voltage change in the sense node. State of the MEMS is comprises a capacitance. A first capacitor is connected between the input of the sense node and the integrator to transmit the first voltage change as a first signal to the second node. The second voltage change as a second signal is routed to the second node via the second capacitor. The integrator to integrate the first and second signals and provides the integrated signal. The ADC has an input coupled to the output of the integrator and converts the integrated signal to a digital signal representative of the capacitance of the MEMS. A DAC having an input coupled to the output of the ADC. The second capacitor is connected between the output and the sense node of the DAC.