METHOD FOR FORMING PERPENDICULAR MAGNETIZATION TYPE MAGNETIC TUNNEL JUNCTION ELEMENT AND APPARATUS FOR PRODUCING PERPENDICULAR MAGNETIZATION TYPE MAGNETIC TUNNEL JUNCTION ELEMENT

摘要

A method of forming a vertically magnetized magnetic tunnel junction element is provided. The method includes the steps of forming a tunnel barrier layer on the first magnetic layer of the object to be processed, cooling the object on which the tunnel barrier layer is formed, and forming a second magnetic layer on the tunnel barrier layer after the cooling step Process.