MICROMIRROR UNIT AND MANUFACTURING METHOD, MICROMIRROR ARRAY, AND OPTICAL CROSS-CONNECT MODULE

摘要

A micromirror unit (200), comprising a mirror (210) and a drive apparatus (220). A side of the mirror (210) facing the drive apparatus (220) is provided with a support post(211). The drive apparatus (220) comprises a supporting frame (221), an rotation block (222) fixedly connected to the supporting post (211), and a plurality of piezoelectric drive arms (223) provided along a peripheral edge of the rotation block (222). An end of each of the piezoelectric drive arms is fixed on the supporting frame (221), and another end thereof is connected to the rotation block (222) via an elastic member (224) provided between the other end and the rotation block. The piezoelectric drive arm (223) comprises an upper electrode, a lower electrode, and a piezoelectric material clamped between the upper electrode and the lower electrode. Further disclosed are a micromirror array (2) comprising a plurality of the micromirror units (200) arranged in an array; and an optical cross-connect module comprising the micromirror array (2).