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SiC CRUCIBLE, SiC SINTERED BODY, AND METHOD OF PRODUCING SiC SINGLE CRYSTAL

机译:SiC坩埚,SiC烧结体以及SiC单晶的制备方法

摘要

In the present invention, in producing a SiC single crystal in accordance with a solution method, a crucible containing SiC as a main component and having an oxygen content of 100 ppm or less is used as the crucible to be used as a container for a Si-C solution. In another embodiment, a sintered body containing SiC as a main component and having an oxygen content of 100 ppm or less is placed in the crucible to be used as a container for a Si-C solution. The SiC crucible and SiC sintered body are obtained by molding and baking a SiC raw-material powder having an oxygen content of 2000 ppm or less. SiC, which is the main component of these, serves as a source for Si and C and allows Si and C to elute into the Si-C solution by heating.
机译:在本发明中,在通过溶液法制造SiC单晶时,使用以SiC为主要成分且氧含量为100ppm以下的坩埚作为用作Si的容器的坩埚。 -C解决方案。在另一个实施方式中,将包含SiC作为主要成分并且氧含量为100ppm以下的烧结体放置在坩埚中以用作Si-C溶液的容器。 SiC坩埚和SiC烧结体是通过将氧含量为2000ppm以下的SiC原料粉末成型并烧成而得到的。 SiC是其中的主要成分,可作为Si和C的来源,并通过加热使Si和C溶入Si-C溶液中。

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