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Chemical drop dropping device and system
Chemical drop dropping device and system
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机译:化学品滴落装置及系统
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摘要
PROBLEM TO BE SOLVED: To provide a chemical liquid dropping apparatus and a system capable of preventing a discharge operation with a chemical liquid discharging device once used.;SOLUTION: According to an embodiment, a chemical liquid dropping apparatus comprises a mounting part, an interface, and a control part. On the mounting part, a chemical liquid discharging device that discharges a chemical liquid is mounted. The interface sends/receives data to/from an external device. The control part acquires a usage history that indicates whether the chemical liquid discharging device has been used from the external device through the interface, and makes the chemical liquid discharging device discharge the chemical liquid in accordance with the usage history.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2019,JPO&INPIT
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