MIRROR DRIVE DEVICE, OPTICAL SCANNING CONTROL DEVICE AND MIRROR DRIVE METHOD

摘要

To suppress ringing.SOLUTION: A mirror drive device 1100 comprises a detection unit 2 for outputting a detection signal having a ringing component included in oscillation of a mirror 110, a drive waveform generation unit 3 for generating a sawtooth-like drive waveform oscillating the mirror 110, a superposing waveform generation unit 51 for generating a superposing waveform to be superposed on the drive waveform, a periodic signal generation unit 61 for generating a periodic signal having the same or nearby frequency with ringing frequency of the ringing component, a correlation value calculation unit for calculating a correlation value between the periodic signal and the detection signal, and an amplitude adjustment unit for adjusting amplitude of the superposing waveform on the basis of the correlation value so that the ringing component becomes small.SELECTED DRAWING: Figure 1