MEMS Mirror Device using Vertical Comb-Drive Actuators for Optical Sensing

摘要

The variable phase-contrast microscope can measure the small height differences at high speed and high precision by changing the phase of reflection. For this purpose we proposed a mirror-driving device (named a variable phase filter) using MEMS (Micro Electro Mechanical System) technology. The configuration of MEMS variable phase filter was designed and fabricated using three vertical electrostatic comb-drive actuators with hinges at the periphery of the mirror, which can tilt and also drive a movable mirror vertically with keeping the parallel position. We evaluated the characteristic of this MEMS variable phase filter and examined the possibility to apply for the variable phase-contrast microscope.