Method for controlling a drive device of a micro oscillating mirror, control device, deflecting mirror device and optical detection device

摘要

A method for controlling at least one comb drive for driving a micro-oscillating mirror, a control device, a deflecting mirror device and an optical detection device are described. In the method, the at least one comb drive is controlled with a periodic control signal so that it drives the micro-oscillating mirror in an oscillating manner. At least one position signal characterizing the oscillation deflection (φ) of the micro-oscillating mirror is detected with at least one position detection device. The control signal is regulated on the basis of the at least one position signal in such a way that the micro-oscillating mirror is driven at least in the vicinity of its resonance frequency. An extrapolation function (f_φ_U) is used to determine a maximum voltage amplitude (U_res) for the control signal from a predetermined maximum vibration amplitude (φ_res) in which the micro-vibration mirror can be deflected, with which the maximum vibration amplitude (φ_res) can be realized. The comb drive is controlled with the periodic control signal with the maximum voltage amplitude (U_res).