CONCENTRATION MANAGEMENT APPARATUS OF CHEMICAL SOLUTION, CALCULATION METHOD OF CONCENTRATION MANAGEMENT CHARGE AND CONCENTRATION MANAGEMENT CHARGE CALCULATION SYSTEM, AND CHEMICAL SOLUTION REGENERATOR, CALCULATION METHOD OF CHEMICAL SOLUTION REGENERATION PROCESSING CHARGE AND REGENERATION PROCESSING CHARGE CALCULATION SYSTEM

摘要

To provide a concentration management apparatus used for providing a service of managing the concentration of a chemical solution used for manufacturing a semiconductor and a liquid crystal display board, a chemical solution regenerator used for providing a service of regenerating the chemical solution, and method and system of calculating the charge for providing the service by using these apparatus.SOLUTION: A concentration management apparatus 1 includes integration flow meters 51-53 in a pipeline for supplying replenisher. A chemical solution regenerator 2 includes an integration flowmeter 54 in a pipeline for supplying reproduced chemical solution. Charges of concentration management and regeneration processing of the chemical solution are calculated on the basis of integrated flow rate in a prescribed period measured by the integration flowmeter. Integration flow meters 221-225 are provided with a communication function and connected with a network 201. The integration flow rate is received by a server system 202 via the network and stored. The server system 202 includes a calculation part 205 for calculating the charge based on the integration flow rate of the prescribed period, for each integration flowmeter.SELECTED DRAWING: Figure 1