PROBLEM TO BE SOLVED: To suppress a reduction in analysis accuracy.SOLUTION: An inductively coupled plasma emission spectroscopic analyzer 1 has: a plasma device 1 for generating an inductively coupled plasma to make an element to be analyzed generate emitted light, and making the emitted light emitted from an emission window unit 17; an optical path change unit 20, connected to the plasma device 10, for changing the direction of the optical path of the emitted light emitted from the emission window unit 17; a spectroscopy unit 30 for separating the emitted light whose direction of optical path is changed by the optical path change unit 20 into spectral components and make detection; a gas supply unit 40 for supplying an inert gas to the optical path change unit 20; and a filter unit 50 for connecting the optical path change unit 20 and the gas supply unit 40 and collecting impurities included in the inert gas, the gas supply unit 40 having a gas tube part 42 at least a portion of which consists of resin.SELECTED DRAWING: Figure 1
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