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INDUCTIVELY COUPLED PLASMA EMISSION SPECTROSCOPIC ANALYZER

机译:电感耦合等离子体发射光谱分析仪

摘要

PROBLEM TO BE SOLVED: To suppress a reduction in analysis accuracy.SOLUTION: An inductively coupled plasma emission spectroscopic analyzer 1 has: a plasma device 1 for generating an inductively coupled plasma to make an element to be analyzed generate emitted light, and making the emitted light emitted from an emission window unit 17; an optical path change unit 20, connected to the plasma device 10, for changing the direction of the optical path of the emitted light emitted from the emission window unit 17; a spectroscopy unit 30 for separating the emitted light whose direction of optical path is changed by the optical path change unit 20 into spectral components and make detection; a gas supply unit 40 for supplying an inert gas to the optical path change unit 20; and a filter unit 50 for connecting the optical path change unit 20 and the gas supply unit 40 and collecting impurities included in the inert gas, the gas supply unit 40 having a gas tube part 42 at least a portion of which consists of resin.SELECTED DRAWING: Figure 1
机译:解决的问题:抑制分析精度的降低。解决方案:电感耦合等离子体发射光谱分析仪1具有:等离子体装置1,用于产生电感耦合等离子体,以使待分析元素产生发射光,并使发射从发射窗口单元17发射的光;连接到等离子体装置10的光路改变单元20,用于改变从发射窗口单元17发射的发射光的光路方向;光谱单元30,用于将由光路改变单元20改变了光路方向的出射光分离成光谱成分并进行检测。气体供给单元40,用于向光路变更单元20供给惰性气体。气体供给部40具有至少一部分由树脂构成的气体管部42,该气体供给部40具有将光路变更部20和气体供给部40连接并收集包含在惰性气体中的杂质的过滤器部50。图:图1

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