METHOD FOR MANUFACTURING WAVEGUIDE-TYPE LIGHT RECEIVING ELEMENT AND WAVEGUIDE-TYPE LIGHT RECEIVING ELEMENT

摘要

To provide a method for manufacturing a waveguide-type light receiving element which can increase the separation resistance between light receiving elements, and the waveguide-type light receiving element.SOLUTION: A waveguide-type light receiving element comprises a light receiving element part 3A and an optical waveguide part 5c arranged on a common semi-insulating or insulating substrate 10. The optical waveguide part 5c comprises a first mesa structure 42 including a first semiconductor layer 11 of a first conductivity type provided on the substrate 10, a core layer 21 provided on the first semiconductor layer, and a clad layer 22 provided on the core layer 21. The light receiving element part 3A comprises a second mesa structure 41 including a light absorption layer 12 provided on the first semiconductor layer 11 and a second semiconductor layer 13 of a second conductivity type provided on the light absorption layer 12. Side surfaces 42a and 42b of the first mesa structure 42 reach the substrate. Side surfaces 41a and 41b of the second mesa structure 41 are separated from the substrate.SELECTED DRAWING: Figure 2