WAVEGUIDE-TYPE LIGHT-RECEIVING ELEMENT AND MANUFACTURE THEREOF

摘要

PURPOSE: To provide a waveguide-type light-receiving element having a structure, in which guided light coupling with good efficiency can be realized. ;CONSTITUTION: In a waveguide-type light-receiving element having at least a light-receiving part 40 formed in a substrate 30, an insulating layer 20 formed on the substrate, and a waveguide layer 10 formed on the substrate containing the insulating layer 20 and also having a coupling part with a so-called tapered cross section where the thickness of the insulating layer 20 is gradually decreased around the light-receiving part 40 to become thin or zero on the light- receiving part, the upper part 51 of the taper is shaped into a taper gentler than that of the lower part 52. Therefore, when the upper end of the tapered cross section forming the coupling part of the waveguide-type light-receiving element is shaped into a taper gentler than that of the lower part, it is possible to form a coupling structure with little scattering of guided light from a comparatively short coupling part.;COPYRIGHT: (C)1993,JPO&Japio