Ellipsometry Device and Ellipsometry Method

摘要

The present invention provides an ellipsometry device and an ellipsometry method whereby measurement efficiency can be enhanced. In this method, an object is illuminated by spherical-wave-like illumination light Q linearly polarized at 45° (S1), and an object light O, being a reflected light, is acquired in a hologram I_OR using a spherical-wave-like reference light R having a condensing point near the condensing point of the illumination light Q, and a hologram I_LR of the reference light R is furthermore acquired using a spherical-wave reference light L having the same condensing point as that of the illumination light Q (S2). The holograms are separated into p- and s-polarized light holograms I^K_OR, I^K_LR, κ=p, s and processed to extract object light waves, and object light spatial frequency spectra G^K(u, v), κ=p, s are generated (S3) (S4). Ellipsometric angles ψ(θ), Δ(θ) are obtained for each incident angle θ from the amplitude reflection coefficient ratio ρ=G^p/G^s=tan ψ·exp(iΔ). Through use of numerous lights having different incident angles θ included in the illumination light Q, data of numerous reflection lights can be acquired collectively in a hologram and can be processed.