An Ellipsometry Device Using Spectral Imaging And Ellipsometry Method Thereof

摘要

The invention spectroscopy relates to ellipsometric devices and ellipsometric method using the image-forming, the collimator to fit to the multi-point area to specify / segmented multi-point region on the surface of the sample and the light source for the incident to which polarized white light group and the reflection white light there is a characteristic adapted to the spectral image-forming groups include for spectroscopy / imaging optical group and analysis, polarized white light to polarized light for optical analyzes. Since the particular spectral imaging group has a white light collimated to fit the multi-point region is incident, spectroscopy by wavelength by the spectral element, hanchuk of the imaging surface has been imaged by the position of each point forming a multi-point area, the other hanchuk has been imaged by the wavelength position it is possible to obtain a star / wavelength-specific optical data having the physical property information. Therefore, by obtaining information of the physical properties of the multi-point region and at the same time, also possible to obtain rich data, such as that obtained by spectral wavelength has the effect of enhancing speed and reliability of the measurement. ; Spectral imaging, ellipsometry, multi-point area, the wavelength