A quadrature ADC feedback compensation system and method for MEMS gyroscope is disclosed. In an embodiment, a MEMS gyroscope comprises an analog processing chain including a drive circuit for generating an analog drive signal and a sense circuit that is configured to generate an analog rate signal and an analog quadrature signal in response to a change in capacitance output by the MEMS gyroscope. A compensation circuit coupled to the sense circuit is configured to null the analog quadrature signal using the analog drive signal and a compensation value, and to adaptively compensate, in a digital processing chain, a quadrature-induced rate offset of a digital rate signal over temperature using a digital quadrature signal, the compensation value and temperature data.
展开▼
