A QUADRATURE COMPENSATION METHOD FOR MEMS GYROSCOPES AND A GYROSCOPE SENSOR

摘要

The present invention relates to a gyroscope sensor for detecting a rotational motion about a sensitivity axis and comprising means for quadrature compensation. The gyroscope sensor comprises a total inertial mass comprising a first inertial mass and a second inertial mass physically attached to each other and arranged such that a rotation of the first inertial mass about a detection axis caused by the coriolis force when the gyroscope sensor is subjected to a rotation about a sensitivity axis. The gyroscope further comprises a first drive structure having a displaceable drive frame which may cause a respective of the first or second inertial mass to rotate about the detection axis in order to compensate for quadrature errors originating from faulty coupling between a drive mode and a sense mode of the gyroscope sensor.