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MEMS SENSORS, METHODS FOR PROVIDING SAME AND METHOD FOR OPERATING A MEMS SENSOR
MEMS SENSORS, METHODS FOR PROVIDING SAME AND METHOD FOR OPERATING A MEMS SENSOR
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机译:MEMS传感器,其提供方法和操作MEMS传感器的方法
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摘要
In accordance with an embodiment, a MEMS sensor includes a MEMS arrangement having a movable electrode and a stator electrode arranged opposite the movable electrode. The MEMS sensor includes a first bias voltage source, which is connected to the stator electrode and which is configured to apply a first bias voltage to the stator electrode. The MEMS sensor further includes a common-mode read-out circuit connected to the stator electrode by a capacitive coupling and comprising a second bias voltage source, which is configured to apply a second bias voltage to a side of the capacitive coupling that faces away from the stator electrode.
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