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MEMS sensors, methods for providing same and method for operating a MEMS sensor
MEMS sensors, methods for providing same and method for operating a MEMS sensor
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机译:MEMS传感器,提供该方法的方法以及操作该MEMS传感器的方法
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摘要
In accordance with an embodiment, a MEMS sensor includes a MEMS arrangement having a movable electrode and a stator electrode arranged opposite the movable electrode. The MEMS sensor includes a first bias voltage source, which is connected to the stator electrode and which is configured to apply a first bias voltage to the stator electrode. The MEMS sensor further includes a common-mode read-out circuit connected to the stator electrode by a capacitive coupling and comprising a second bias voltage source, which is configured to apply a second bias voltage to a side of the capacitive coupling that faces away from the stator electrode.
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