The present invention raises a liquid material to a desired height while maintaining a liquid supply tube and a supply destination at low pressure. A liquid material supply device for supplying a liquid material to a supply point, the liquid material supply device being provided with: a storage container in which the liquid material is stored; a liquid supply tube connected to the supply point at a position higher than the liquid level of the liquid material stored in the storage container, the liquid supply tube supplying the liquid material from the storage container to the supply point; and a supply mechanism constituted so as to supply the liquid material stored in the storage container to the inside of the liquid supply tube by reducing the pressure in the liquid supply tube to become lower than the pressure in the storage container and supplying a gas to the inside of the storage container.
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