Liquid material supply apparatus, liquid material supply method, liquid supply pipe purging method, and material gas supply system

摘要

In order to provide a liquid material supply device capable of supplying liquid material at a lower pressure than before while allowing the liquid material to be raised above a desired height, a storage container for storing the liquid material, and the storage A lead-out pipe through which liquid material is led out from the container, a temporary stay part connected to the lead-out pipe and temporarily retaining a predetermined amount of liquid material led out from the storage container, and a temporary stay in the temporary stay part A pressure feeding mechanism configured to bring a gas into contact with the liquid material, and push the gas upward to transport it.