DEVICE FOR AFFIXING WAFER TO SINGLE-SIDE POLISHING DEVICE, AND METHOD FOR AFFIXING WAFER TO SINGLE-SIDE POLISHING DEVICE

摘要

A device (2) for affixing a wafer (W) to a single-side polishing device (1), wherein the device (2) affixes the wafer to the single-side polishing device by means of surface tension of water, is provided with: a temporary cradle (21) which supports the wafer (W) by coming into contact with the wafer (W) at an outer circumferential edge thereof; and a water discharge tank (22) which is provided on the temporary cradle (21) and discharges water onto the wafer (W).