TRICHLOROSILANE MANUFACTURING APPARATUS, AND METHOD FOR MANUFACTURING TRICHLOROSILANE

摘要

The purpose of the present invention is to prevent corrosion and stress corrosion cracking due to hydrochloric acid generated in a filter element (80) portion. A trichlorosilane manufacturing apparatus (1) provided with a reaction device (2) for generating trichlorosilane and a filter device (3) for removing a reaction residue, the filter device (3) being provided with a filter element constituted from a corrosion-resistant material.