TRICHLOROSILANE MANUFACTURING APPARATUS, AND METHOD FOR MANUFACTURING TRICHLOROSILANE

摘要

An object is to prevent corrosion and stress-corrosion cracking that would be caused by hydrochloric acid which would be formed at or near a filter element (80). A trichlorosilane production apparatus (1) includes: a reactor (2) configured to produce trichlorosilane; and a filter device (3) configured to remove a reaction residue, the filter device (3) including a filter element that is comprised of a corrosion-resistant material.