Trichlorosilane manufacturing apparatus and manufacturing method of trichlorosilane

摘要

It is an object to prevent corrosion and stress corrosion cracking caused by hydrochloric acid generated in the filter element 80 portion. A trichlorosilane production device (1) comprising a reaction device (2) for generating trichlorosilane and a filter device (3) for removing reaction residues, the filter device (3) comprising a filter element made of a corrosion-resistant material It is provided.