POLISHING HEAD FOR FACE-UP TYPE POLISHING APPARATUS POLISHING APPARATUS INCLUDING THE POLISHING HEAD AND POLISHING METHOD USING THE POLISHING APPARATUS

摘要

The present invention provides a face-up polishing apparatus which supplies a polishing liquid without using a rotary joint. According to an embodiment of the present invention, a polishing head for a face-up polishing apparatus used by installing a polishing head on a lower surface thereof comprises: a liquid reservoir unit arranged around a rotary shaft of the polishing head to receive a liquid; and a liquid outlet arranged on a lower surface of the polishing head to discharge the liquid received by the liquid reservoir unit. An annular opening is formed on an upper portion of the polishing head around the rotary shaft of the polishing head. The liquid reservoir unit communicates with a space outside the polishing head through the opening.