Method for cleaning hollow fiber membrane device, Ultrafiltration membrane device, Ultrapure water production device and Hollow fiber membrane device

摘要

There is provided a cleaning method of a hollow fiber membrane device that efficiently removes fine particles while suppressing the influence on the startup time of an ultrapure water production system. The cleaning method of the hollow fiber membrane device includes washing the hollow fiber membrane device 10 before being installed in the ultrapure water production device with an alkaline aqueous solution in a cleaning device 21 different from the ultrapure water production device.