Cleaning method of hollow fiber membrane device, ultrafiltration membrane device, ultrapure water production device and cleaning device of hollow fiber membrane device

摘要

Provided is a method of washing a hollow fiber membrane device which can efficiently remove fine particles while limiting the impact of an ultrapure water production system on the starting time. The method of washing a hollow fiber membrane device includes washing a hollow fiber membrane device with an alkaline aqueous solution before the hollow fiber membrane device is installed in an ultrapure water production system. The hollow fiber membrane device is washed by means of a washing device that is different from the ultrapure water production system.