METHOD FOR CLEANING HOLLOW FIBER MEMBRANE DEVICE, ULTRAFILTRATION MEMBRANE DEVICE, ULTRAPURE WATER PRODUCTION DEVICE, AND DEVICE FOR CLEANING HOLLOW FIBER MEMBRANE DEVICE

摘要

PROBLEM TO BE SOLVED: To efficiently remove particulates while suppressing an influence on start-up time of an ultrapure water production device.SOLUTION: A method for cleaning a hollow fiber membrane device includes a step of cleaning a hollow fiber membrane device 10 before being installed to an ultrapure water production device with alkaline aqueous solution in a washing device 21 that is different from the ultrapure water production device.SELECTED DRAWING: Figure 3