Stage unit and substrate treatment apparatus including the same and processing method using the same

摘要

The present invention relates to a to-be-processed object support device, a to-be-processed object processing device, and a to-be-processed object processing method, comprising: a chamber forming an interior space in which a to-be-processed object is processed, one side, the other side facing the one side, and the one side; A variable fixing unit including a base including a side connecting the other surface, and fixed members installed on the base, the fixing members being variable in position corresponding to the size of the object, and connected to the variable fixing unit, thereby providing data of the object to be processed. And a light irradiation unit for irradiating light in a direction perpendicular to the conveying direction of the object to be processed, the tray including a control unit for controlling the movement of the fixing members according to the position of the plurality of fixing members according to the data of the object to be processed. By adjusting and fixing the workpiece, various sizes of workpieces can be easily supported and processed.