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METHODS FOR DEPOSITING POLYMER LAYER FOR SENSOR APPLICATIONS VIA HOT WIRE CHEMICAL VAPOR DEPOSITION
METHODS FOR DEPOSITING POLYMER LAYER FOR SENSOR APPLICATIONS VIA HOT WIRE CHEMICAL VAPOR DEPOSITION
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机译:通过热丝化学气相沉积法沉积用于传感器的聚合物层的方法
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摘要
The present disclosure relates to a method of depositing a polymer layer, including: providing a substrate, having a sensor structure disposed on the substrate, to a substrate support within a hot wire chemical vapor deposition (HWCVD) chamber; providing a process gas comprising an initiator gas and a monomer gas and a carrier gas to the HWCVD chamber; heating a plurality of filaments disposed in the HWCVD chamber to a first temperature sufficient to activate the initiator gas without decomposing the monomer gas; and exposing the substrate to initiator radicals from the activated initiator gas and to the monomer gas to deposit a polymer layer atop the sensor structure.
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