MANUFACTURING METHOD OF FILM BODY, MANUFACTURING METHOD OF HYDROGEN DETECTION ELEMENT, FILM BODY, HYDROGEN DETECTION ELEMENT AND HYDROGEN DETECTOR

摘要

To provide a hydrogen detection element capable of improving responsiveness of hydrogen storage discharge to a hydrogen storage metal, and improved hydrogen detection sensitivity; and to provide a manufacturing method thereof, a film body useful therefor, a manufacturing method thereof, and a hydrogen detector.SOLUTION: A manufacturing method of a film body has a step (i) for forming an alloy layer containing palladium and another noble metal, and a step (ii) for bringing beforehand hydrogen into contact with the alloy layer formed in the step (i). A hydrogen detection element to be adopted is formed by depositing, on a substrate, a film body 14 comprising a hydrogen storage alloy 16 containing palladium and another noble metal, and having a crack 15 generated thereon.SELECTED DRAWING: Figure 5