Method for producing a cured pattern film, method for producing an electronic component, and positive photosensitive resin composition used for the method for producing a cured pattern film

摘要

PROBLEM TO BE SOLVED: To provide a production method of a pattern cured film by which a pattern cured film excellent in mechanical characteristics can be produced.SOLUTION: The production method of a pattern cured film includes: a step of applying a positive photosensitive resin composition comprising a specific component on a substrate and drying the composition to form a positive photosensitive resin film; a first exposure step of exposing a predetermined part of the positive photosensitive resin film; a step of developing the positive photosensitive resin film exposed in the first exposure step by using an alkali aqueous solution; a second exposure step of exposing the developed positive photosensitive resin film; and a step of subjecting the positive photosensitive resin film exposed in the second exposure step to a heat treatment.SELECTED DRAWING: None