Substrate cleaning apparatus, cleaning tool and substrate processing apparatus, and method of removing, attaching and replacing cleaning tool

摘要

PROBLEM TO BE SOLVED: To provide a substrate cleaning device which enables a cleaning tool to be easily replaced without contaminating a surface of the cleaning tool and the cleaning tool, and to provide detachment, attachment and replacement methods of the cleaning tool.SOLUTION: According to one embodiment of the invention, a substrate cleaning device includes: a roll type first cleaning tool having a first cleaning member, a first shaft and a second shaft; a holding member having a first shaft holder, which detachably fixes the first shaft, and a second shaft holder, which detachably fixes the second shaft, the holding member configured to make a distance between the first shaft holder and the second shaft holder variable and used to hold the first cleaning tool; a driving mechanism for moving the holding member; hook members which allow the first cleaning tool to be placed thereon and are used to detach the first cleaning tool from the holding member; and a standby stand which allows a roll type second cleaning tool, which has a second cleaning member, a third shaft and a fourth shaft, to be placed thereon and is used to attach the second cleaning tool to the holding member.SELECTED DRAWING: Figure 1