Board assembly apparatus, board assembly system using the apparatus, and board assembly method using the system

摘要

PROBLEM TO BE SOLVED: To provide a substrate assembling device efficiently removing gas from a space between an upper substrate and a lower substrate, a substrate assembling system using the device and a substrate assembling method using the system.SOLUTION: The substrate assembling device comprises a vacuum chamber 5 which can store an upper substrate K1 and a lower substrate K2 under a vacuum environment, a vertically moving mechanism (a Z-axis driving mechanism 20) which moves the upper substrate vertically and a vacuum pump mechanism P0 which performs vacuuming for exhausting gas inside the vacuum chamber 5 to the outside. The vertically moving mechanism (the Z-axis driving mechanism 20) changes a separation distance between the upper substrate K1 and the lower substrate K2 by moving the upper substrate K1 in a vertical direction during performing the vacuuming.SELECTED DRAWING: Figure 8I