Board assembly apparatus, board assembly system using the apparatus, and board assembly method using the system

摘要

PROBLEM TO BE SOLVED: To efficiently remove gas from between an upper substrate and a lower substrate. SOLUTION: A vacuum chamber 5 capable of accommodating a lower substrate K1 and an upper substrate K2 in a vacuum environment, a vertical movement mechanism (Z-axis drive mechanism 20) for vertically moving the upper substrate, and a gas inside the vacuum chamber 5. And a vacuum pump mechanism P0 for performing a vacuum evacuation to the outside, and the vertical movement mechanism (Z-axis drive mechanism 20) moves the upper substrate K1 in the vertical direction during the vacuum evacuation. , The separation distance between the upper substrate K1 and the lower substrate K2 is changed. [Selection diagram] Fig. 8I