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Wafer box, method for arranging wafers in a wafer box, wafer protection plate and method for protecting a wafer
Wafer box, method for arranging wafers in a wafer box, wafer protection plate and method for protecting a wafer
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机译:晶片盒,在晶片盒中布置晶片的方法,晶片保护板和用于保护晶片的方法
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摘要
Various embodiments provide a wafer box. The wafer box may include a housing with a receiving space for receiving at least one wafer arranged above a housing base, at least one fixing structure which is connected to the housing base and which extends from the housing base, and at least one fixing device which is fastenable to the at least one fixing structure at a variable distance from the housing base. The fixing device and the fixing structure are designed such that the at least one wafer for arrangement in the receiving space can be fixed in a position by means of the at least one fixing device fastened to the fixing structure.
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