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Lateral bipolar junction transistor with abrupt junction and compound buried oxide

机译:具有突变结和复合掩埋氧化物的横向双极结型晶体管

摘要

A lateral bipolar junction transistor (LBJT) device that may include a dielectric stack including a pedestal of a base region passivating dielectric and a nucleation dielectric layer; and a base region composed of a germanium containing material or a type III-V semiconductor material in contact with the pedestal of the base region passivating dielectric. An emitter region and collector region may be present on opposing sides of the base region contacting a sidewall of the pedestal of the base region passivating dielectric and an upper surface of the nucleation dielectric layer.
机译:横向双极结型晶体管(LBJT)器件,可以包括电介质堆叠,该电介质堆叠包括钝化电介质的基极区的基部和成核电介质层;基底区由与基底区钝化电介质的基座接触的含锗材料或III-V型半导体材料组成。发射极区和集电极区可以存在于与基极区钝化电介质的基座的侧壁和成核电介质层的上表面接触的基极区的相对侧上。

著录项

  • 公开/公告号US10727299B2

    专利类型

  • 公开/公告日2020-07-28

    原文格式PDF

  • 申请/专利权人 INTERNATIONAL BUSINESS MACHINES CORPORATION;

    申请/专利号US201816149598

  • 申请日2018-10-02

  • 分类号H01L29/08;H01L29/735;H01L23/31;H01L29/161;H01L29/20;H01L29/10;H01L29/737;H01L29/165;H01L29/04;H01L29/06;H01L23/29;H01L29/66;H01L21/683;H01L21/02;H01L21/308;H01L21/265;H01L21/74;

  • 国家 US

  • 入库时间 2022-08-21 11:28:23

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