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Polymer for Organic Bottom Anti-Reflective Coating and Bottom Anti-Reflective Coating Composition Containing the Same
Polymer for Organic Bottom Anti-Reflective Coating and Bottom Anti-Reflective Coating Composition Containing the Same
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机译:用于有机底部抗反射涂料的聚合物和包含该聚合物的底部抗反射涂料组合物
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摘要
Provided are a polymer for an organic bottom anti-reflective coating and a bottom anti-reflective coating composition containing the same. More specifically, provided are a polymer for an organic bottom anti-reflective coating capable of relieving reflection of exposure light and irradiation light on a substrate of a photoresist layer applied on the substrate in a lithographic process of manufacturing a semiconductor device, and a bottom anti-reflective coating composition containing the same.
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