SPUTTERING TARGET PACKAGING STRUCTURE AND METHOD OF PACKAGING SPUTTERING TARGET

摘要

A sputtering target packaging structure comprising:a sputtering target including a cylinder part, a flange part disposed on an opening part at one end of the cylinder part, and a cap disposed on an opening part at the other end of the cylinder part; anda packing material made up of a sheet and covering an inner surface and an outer surface of the sputtering target in a close contact state, whereinthe packing material includes seal parts on both end sides of the sputtering target.