SENSITIVE LAYER FOR HUMIDITY SENSOR WITH SURFACE ACOUSTIC WAVES

摘要

The invention relates to a process for preparing a sensitive layer to be used in SAW sensors for monitoring relative humidity. According to the invention, the process consists of the following stages: synthesis of hydrophilic CNO materials or oxidated carbon nanohorns by water or oxygen plasma treatment, preparation of a solution of silicon dioxide and 0.5...15% by mass oxidated carbon nanohorns and deposition of said solution on a quartz substrate, by spin coating method, to result in a film which is subjected to a heat treatment, at a temperature of 400°C, for 30 min.