SURFACE ACOUSTIC WAVE GAS SENSOR WITH SENSITIVE GETTER LAYER AND PROCESS FOR ITS MANUFACTURE

摘要

A surface acoustic wave gas sensor, in particular a vacuum or hydrogen sensor, includes a piezoelectric substrate (1) on which at least one layer of a gas-sensitive material (6) is arranged between two inter-digital transducers (2, 3). The gas-sensitive material includes a getter material, such that the molecules sorbed by this getter material can vary the frequency of a signal transmitted between the two transducers (2, 3). A process for manufacturing this sensor is also provided using a mask to deposit the gas-sensitive material between the transducers, preferably by sputtering.