Design and Analysis of a Novel Surface Acoustic Wave Micro Position Sensor

摘要

In order to realize the micromation of position sensors, and extend the application area into micro scale, this paper designs a novel micro position sensor, Mace SAW (Surface Acoustic Wave) position sensor, which can be fabricated with MEMS technology. Its key components are IDTs (Interdigital Transducers) and reflective grooves. The structure and working principles of the sensor are introduced theoretically, and the manufacture process is then put forward.