SURFACE ACOUSTIC WAVE HUMIDITY SENSOR CAPABLE OF DETECTING HUMIDITY BY THE LAMINATION OF NANO-CRYSTALLINE MATERIAL ON A PIEZOELECTRIC SUBSTRATE

摘要

PURPOSE: A surface acoustic wave humidity sensor is provided to reduce manufacturing costs using a sensing layer made of zinc oxide.;CONSTITUTION: A surface acoustic wave humidity sensor comprises a substrate(110), a piezoelectric layer(120), an input unit(130), a sensing layer(140), and an output unit(150). The piezoelectric layer is laminated on the substrate and is made of aluminum-nitride. The input unit converts the signal applied by the application of external signals into a surface acoustic wave. As the converted surface acoustic wave is inputted, the sensing layer senses the humidity and outputs the surface acoustic wave corresponding to the sensed humidity. The output unit interprets the outputted surface acoustic wave and converts the surface acoustic wave into the electric signal.;COPYRIGHT KIPO 2011