首页> 外国专利> Single crystal of silicon with 100 orientation, which is doped with n-type dopant, and method for producing such a single crystal

Single crystal of silicon with 100 orientation, which is doped with n-type dopant, and method for producing such a single crystal

机译:掺杂有n型掺杂剂的,取向为<100>的硅单晶及其制造方法

摘要

Single crystal silicon with 100 orientation is doped with n-type dopant and comprises a starting cone, a cylindrical portion and an end cone, a crystal angle being not less than 20° and not greater than 30° in a middle portion of the starting cone, the length of which is not less than 50% of a length of the starting cone, and edge facets extending from a periphery of the single crystal into the single crystal, the edge facets in the starting cone and in the cylindrical portion of the single crystal in each case having a length which is not more than 700 μm.
机译:取向<100>的单晶硅掺杂有n型掺杂剂,并包括起始锥,圆柱部分和末端锥,在其中间部分的晶体角不小于20°且不大于30°。起始锥,其长度不少于起始锥的长度的50%,以及从单晶的外围延伸到单晶的边缘小面,起始锥和圆柱体的圆柱部分的边缘小面单晶的长度分别不超过700μm。

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号