SINGLE CRYSTAL PIEZOELECTRIC FILM BULK ACOUSTIC RESONATOR AND MANUFACTURING METHOD THEREOF

摘要

A single crystal piezoelectric film bulk acoustic resonator and a manufacturing method thereof. The manufacturing method comprises: forming a piezoelectric structure and a top electrode at a donor substrate, wherein the top electrode is arranged above the piezoelectric structure; forming a cavity and a bottom electrode at a transfer substrate, wherein the bottom electrode covers the cavity; and employing a dry transfer printing process to transfer the piezoelectric structure and the top electrode from the donor substrate to the bottom electrode. The method is easy to implement, provides a good quality single crystal piezoelectric film, and has a high production yield. The single crystal piezoelectric film bulk acoustic resonator has favorable performance.