BULK ACOUSTIC WAVE RESONATOR HAVING ASYMMETRIC ELECTRODE THICKNESS, FILTER, AND ELECTRONIC DEVICE

摘要

The present invention relates to a bulk acoustic wave resonator, comprising: a base; an acoustic mirror; a sandwich structure composed of a top electrode, a piezoelectric layer and a bottom electrode, an overlap portion of the top electrode, the piezoelectric layer, the bottom electrode and the acoustic mirror in the thickness direction of the resonator forming an effective region; and a reinforcement structure on one side of the sandwich structure, the enhancement structure being used for reflecting acoustic waves to increase the Q value, the thickness of an electrode located on the one side of the sandwich structure being less than the thickness of an electrode located on the other side of the sandwich structure. The present invention also relates to a filter and an electronic device having the filter.