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2- - Fabrication Methods for 2-Terminal Switching Device Having Bipolar Switching Property and Resistance Memory Cross-Point Array Having the Same

机译:具有双极开关特性的2-端子开关装置和具有相同电阻存储交叉点阵列的2-制造方法

摘要

Provided are a two-terminal switching device having bidirectional switching characteristics and a method of manufacturing a resistive memory device cross-point array including the same. A method of manufacturing a two-terminal switching device includes forming a first conductive lower metal oxide semiconductor layer on a first electrode. A second conductivity type metal oxide semiconductor layer is formed on the first conductivity type lower metal oxide semiconductor layer. A first conductive upper metal oxide semiconductor layer is formed on the second conductive metal oxide semiconductor layer. A second electrode is formed on the first conductive upper metal oxide semiconductor layer.
机译:提供了一种具有双向开关特性的二端子开关装置以及包括该端子开关的电阻存储装置交叉点阵列的制造方法。一种制造双端子开关装置的方法,包括在第一电极上形成第一导电下部金属氧化物半导体层。在第一导电类型的下部金属氧化物半导体层上形成第二导电类型的金属氧化物半导体层。在第二导电金属氧化物半导体层上形成第一导电上金属氧化物半导体层。在第一导电上金属氧化物半导体层上形成第二电极。

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